Positron-Annihilation-Spectroscopy Study of Proton-Induced Defects in Silicon

Author： Grafutin V. Ilyukhina O. Myasishcheva G. Kalugin V. Prokopiev E. Timoshenkov S. Khmelevskii N. Funtikov Yu.

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.34, Iss.3, 2005-05, pp. : 181-186

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