Characterisation of semi-insulating polysilicon oxygen doped silicon thin films

Author： Lynch S.   Greef R.   Stoemenos J.   Dartnell N. J.   Lloyd N. S.   Kern P.   Stuck R.   Crean G. M.  

Publisher： Maney Publishing

ISSN： 1743-2847

Source： Materials Science and Technology, Vol.11, Iss.1, 1995-01, pp. : 80-84

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