Effects of rapid thermal treatments on Ti/TiN/Si structures for electrical contacts on silicon

Author: Pérez-Rigueiro J.   Fernández M.   Jimenez C.   Pérez-Casero R.   Martínez-Duart J. M.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.11, Iss.11, 1995-11, pp. : 1210-1214

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Abstract