Defect compensation at the interface between directly bonded silicon wafers

Author: Laporte A.   Lescouzères L.   PeyreLavigne A.   Sarrabayrouse G.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.14, Iss.12, 1998-12, pp. : 1299-1302

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Abstract