Sidewall Surface Roughness of Sputtered Silicon I: Surface Modelling

By Ali M. Y.   Hung N. P.   Ngoi B. K. A.   Yuan S.  

Surface Engineering, Vol. 19, Iss. 2, 2003-04 ,pp. : 97-103

Maney Publishing

Access to resources Recommend Favorite

Low-loss silicon waveguides with sidewall roughness reduction using a SiO2 hard mask and fluorine-based dry etching

By  

Journal of Micromechanics and Microengineering, Vol. 25, Iss. 1, 2015-01 ,pp. : 15003-15010

IOP Publishing

Access to resources Recommend Favorite

Research on the prediction model of micro-milling surface roughness

By Wang Xinxin   Lu Xiaohong   Jia Zhenyuan   Jia Xv   Li Guangjun   Wu Wenyi  

International Journal of Nanomanufacturing, Vol. 9, Iss. 5-6, 2013-11 ,pp. : 457-467

Inderscience Publishers

Access to resources Recommend Favorite

A surface roughness prediction model for hard turning process

By Singh Dilbag   Rao P.  

The International Journal of Advanced Manufacturing Technology, Vol. 32, Iss. 11-12, 2007-05 ,pp. : 1115-1124

Springer Publishing Company

Access to resources Recommend Favorite

The effects of oxygen plasma and humidity on surface roughness, water contact angle and hardness of silicon, silicon dioxide and glass

By Alam A U   Howlader M M R   Deen M J  

Journal of Micromechanics and Microengineering, Vol. 24, Iss. 3, 2014-03 ,pp. : 35010-35023

IOP Publishing

Access to resources Recommend Favorite