Effect of sputtering pressure and temperature on DC magnetron sputtered CrN films

By Shah H. N.   Jayaganthan R.   Kaur D.  

Surface Engineering, Vol. 26, Iss. 8, 2010-11 ,pp. : 629-637

Maney Publishing

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Tribological characterisation of magnetron sputtered Ti(C, O, N) thin films

By Olteanu C.   Munteanu D.   Ionescu C.   Munteanu A.   Chappe J.M.   Cunha L.   Vaz F.  

International Journal of Materials and Product Technology, Vol. 39, Iss. 1-2, 2010-07 ,pp. : 186-194

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Deposition process, microstructure and mechanical behaviours of RF magnetron sputtered (Ti,Al)N thin films

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Relationship between composition, bonding constitution and microstructure in unbalanced magnetron sputtered Ti–B–N thin films

By Lu Y. H.   Shen Y. G.   Li K. Y.  

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Micro/nanomechanical behavior of magnetron sputtered Si–C–N coatings through nanoindentation and scratch tests

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Journal of Micromechanics and Microengineering, Vol. 21, Iss. 1, 2011-01 ,pp. : 15011-15018

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