Author: Hu Chih-Min Lo Kuo-Hsuan Hung Chung-Yu Chu Chun-Hsueh Chang Da-Chiang Liu Jih-Hsin Gong Jeng Huang Chih-Fang
Publisher: IOP Publishing
ISSN: 0268-1242
Source: Semiconductor Science and Technology, Vol.27, Iss.1, 2012-01, pp. : 15017-15022
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Abstract