Unexpected surface implanted layer in static random access memory devices observed by microwave impedance microscope

Author: Kundhikanjana W   Yang Y   Tanga Q   Zhang K   Lai K     Kelly M A   Li X X   Shen Z-X  

Publisher: IOP Publishing

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.28, Iss.2, 2013-02, pp. : 25010-25014

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