Impacts of post-metallization annealing on the memory performance of Ti/HfO2-based resistive memory

Author: Chen Pang-Shiu   Chen Yu-Sheng   Lee Heng-Yuan  

Publisher: IOP Publishing

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.28, Iss.2, 2013-02, pp. : 25016-25022

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