Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films

Author： Hees J Heidrich N Pletschen W Sah R E Wolfer M Williams O A Lebedev V Nebel C E Ambacher O

ISSN： 0957-4484

Source： Nanotechnology, Vol.24, Iss.2, 2013-01, pp. : 25601-25607

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