Self-alignment in the stacking of microchips with mist-induced water droplets

Author: Chang Bo   Sariola Veikko   Jääskeläinen Mirva   Zhou Quan  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.1, 2011-01, pp. : 15016-15026

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