A multi-step electrochemical etching process for a three-dimensional micro probe array

Author: Kim Yoonji   Youn Sechan   Cho Young-Ho   Park HoJoon      

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.1, 2011-01, pp. : 15019-15026

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Abstract