Author： Nallamuthu Punithavelan Hwang Il-Han Jeong Dae-Hun Moon Seung-Hwan Seo Seung-Wan Lee Jong-Hyun
Publisher： IOP Publishing
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.21, Iss.1, 2011-01, pp. : 15018-15025
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