Fabrication of CMOS-compatible optical filter arrays using gray-scale lithography

Author: Xiao Jing   Song Fuchuan   Han Kijeong   Seo Sang-Woo  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 25006-25010

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