Author: Bu Minqiang Perch-Nielsen Ivan R Sørensen Karen S Skov Julia Sun Yi Pedersen Michael E Hansen Mikkel F Wolff Anders
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.7, 2013-07, pp. : 74002-74010
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