Author: Dingeldein Joseph C Walczak Karl A Swatowski Brandon W Friedrich Craig R Middlebrook Christopher T Roggemann Michael C
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.7, 2013-07, pp. : 75015-75023
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
By Lim Y C Boukany P E Farson D F Lee L J
Journal of Micromechanics and Microengineering, Vol. 21, Iss. 1, 2011-01 ,pp. :