Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance

Author： Jackson Nathan   O’Keeffe Rosemary   Waldron Finbarr   O’Neill Mike   Mathewson Alan  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.7, 2013-07, pp. : 75014-75022

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