Silicon–glass-based single piezoresistive pressure sensors for harsh environment applications

Author: San Haisheng   Zhang Hong   Zhang Qiang   Yu Yuxi   Chen Xuyuan  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.7, 2013-07, pp. : 75020-75027

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