Author： Zhang Yiming Li Nannan Yan Bo Feng Xiaoyang Hu Jia He Shuwei Hao Yilong Chen Jing
Publisher： IOP Publishing
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.7, 2013-07, pp. : 75026-75031
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
By Yoshida Shinya Wang Nan Kumano Masafumi Kawai Yusuke Tanaka Shuji Esashi Masayoshi
Journal of Micromechanics and Microengineering, Vol. 23, Iss. 6, 2013-06 ,pp. :
Access to resources
Recommend
By Bannan J. Temple R. I. Jones R.
Materials Science and Technology, Vol. 19, Iss. 8, 2003-08 ,pp. :
Materials Science and Technology, Vol. 1, Iss. 4, 1985-04 ,pp. :