Theoretical and experimental study of ion flux formation in an asymmetric radio-frequency capacitive discharge

Author： Schweigert I V Ariskin D A Chernoiziumskaya T V Smirnov A S

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.20, Iss.1, 2011-02, pp. : 15011-15018

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