TiN thin films deposited by filtered arc-evaporation: structure, properties and applications

Author: Konyashin I.   Fox-Rabinovich G.   Dodonov A.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.32, Iss.22, 1997-12, pp. : 6029-6038

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