Mass dependence of nitride sputtering

Author: Elovikov S. S.   Khrustachev I. K.   Mosunov A. S.   Yurasova V. E.  

Publisher: Taylor & Francis Ltd

ISSN: 1042-0150

Source: Radiation Effects and Defects in Solids, Vol.158, Iss.8, 2003-08, pp. : 573-582

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract