TEMPORARY PACKAGING OF PZT THIN-FILM MICROACTUATORS

Author： LEE CHENG-CHUN   HUME CLIFFORD   CAO G.Z.   (STEVE) SHEN I.Y.  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.101, Iss.1, 2008-01, pp. : 121-131

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