Sol-Gel PZT for MEMS Applications

Author: Piekarski Brett   Dubey Madan   Zakar Eugene   Polcawich Ronald   DeVoe Don   Wickenden Dennis  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.42, Iss.1, 2002-01, pp. : 25-37

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Abstract