PREPARATION OF HIGHLY TEXTURED ALN FILMS USING MO AND TI ELECTRODE FOR INTEGRATED ALN-BASED FILM BULK ACOUSTIC WAVE RESONATORS

Author： CHOU CHENG-HSIEN LIN YUNG-CHEN HUANG JIN-HUA TAI NYAN LIN I-NAN

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.80, Iss.1, 2006-11, pp. : 407-413

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