TRIAL FOR MAKING THREE DIMENSIONAL PZT CAPACITOR FOR HIGH DENSITY FERROELECTRIC RANDOM ACCESS MEMORY

Author： FUNAKUBO HIROSHI NAGAI ATSUSHI MINAMIDATE JUN KOO JUNE KIM SUK PARK YOUNGSOO

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.81, Iss.1, 2006-11, pp. : 219-226

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