EFFECTS OF NITROGEN INCORPORATION IN LANTHANUM-BASED DIELECTRIC FILMS

Author: Edon V.   Hugon M. -C.   Agius B.   Bastos K. P.   Miotti L.   Driemeier C.   Salvador L.   Krug C.   Baumvol I. J. R.   Eypert C.   Durand O.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.97, Iss.1, 2008-01, pp. : 129-142

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Abstract