Design and Fabrication of Micro Channels for MEMS Applications

Author： Kumara Guruparan G.   Sathish M.   Sankara Subramaniam N.   Sorna Kumar T.  

Publisher： Taylor & Francis Ltd

ISSN： 1553-3174

Source： Synthesis and Reactivity in Inorganic, Metal-Organic, and Nano-Metal Chemistry, Vol.36, Iss.2, 2006-04, pp. : 185-191

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