MOEMS Fabry–Pérot interferometer with point-anchored Si-air mirrors for middle infrared

Author: Tuohiniemi Mikko   Näsilä Antti   Akujärvi Altti   Blomberg Martti  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95019-95027

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