Effect of high-temperature annealing on AlN thin film grown by metalorganic chemical vapor deposition

Author: Wei-Ying Wang   Peng Jin   Gui-Peng Liu   Wei Li   Bin Liu   Xing-Fang Liu   Zhan-Guo Wang  

Publisher: IOP Publishing

ISSN: 1674-1056

Source: Chinese Physics B, Vol.23, Iss.8, 2014-08, pp. : 87810-87814

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