Evaluating the adhesion of SU-8 thin films using an AlN/Si surface acoustic wave sensor

Author： Gowini Mohamed M El   Moussa Walied A  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|3|35031-35044

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35031-35044

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