A novel MEMS actuator with large lateral stroke driven by Lorentz force

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|2|25009-25015

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.2, 2015-02, pp. : 25009-25015

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