A novel bottom–up copper filling of blind silicon vias in 3D electronic packaging

Author: Du Li   Shi Tielin   Su Lei   Xue Dongmin   Liao Guanglan  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|4|45005-45011

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.4, 2015-04, pp. : 45005-45011

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