Electroplating Copper Mask for Glass Deep Wet Etching in MEMS Relay

Publisher: Bentham Science Publishers

E-ISSN: 1876-4037|4|2|165-169

ISSN: 1876-4029

Source: Micro and Nanosystems, Vol.4, Iss.2, 2012-06, pp. : 165-169

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Abstract