Characterization of O₂/Ar inductively coupled plasma studied by using a Langmuir probe and global model

Author： Liu Wei Wen De-Qi Zhao Shu-Xia Gao Fei Wang You-Nian

E-ISSN： 1361-6595|24|2|25035-25046

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.2, 2015-04, pp. : 25035-25046

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