Vertically etched silicon nano-rods as a sensitive electron detector

Author： Hajmirzaheydarali M   Akbari M   Soleimani-Amiri S   Sadeghipari M   Shahsafi A   Farahani A Akhavan   Mohajerzadeh S  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|7|74003-74008

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 74003-74008

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