Author： Marzouk Jaouad Arscott Steve Haddadi Kamel Lasri Tuami Boyaval Christophe Dambrine Gilles Marzouk Jaouad
Publisher： IOP Publishing
E-ISSN： 1361-6439|25|7|75024-75034
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 75024-75034
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