Nanopore patterning using Al₂O₃ hard masks on SOI substrates

E-ISSN： 1361-6439|25|7|75020-75025

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 75020-75025

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