Author: Silva L R Sousa P J Goncalves L M Minas G
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|7|74007-74015
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 74007-74015
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Abstract
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