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Author: Ruiz-Díez V Hernando-García J Manzaneque T Kucera M Schmid U Sánchez-Rojas J L
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|7|74005-74013
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 74005-74013
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Abstract
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