Author： Ruiz-Díez V Hernando-García J Manzaneque T Kucera M Schmid U Sánchez-Rojas J L
Publisher： IOP Publishing
E-ISSN： 1361-6439|25|7|74005-74013
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 74005-74013
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