Direct-write three-dimensional nanofabrication of nanopyramids and nanocones on Si by nanotumefaction using a helium ion microscope

Author: Zhang L   Heinig N F   Bazargan S   Abd-Ellah M   Moghimi N   Leung K T  

Publisher: IOP Publishing

E-ISSN: 1361-6528|26|25|255303-255307

ISSN: 0957-4484

Source: Nanotechnology, Vol.26, Iss.25, 2015-06, pp. : 255303-255307

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content