Laterally-actuated inside-driven RF MEMS switches fabricated by a SOG process

Author: Wang Li-Feng   Han Lei   Tang Jie-Ying   Huang Qing-An  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|6|65007-65016

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.6, 2015-06, pp. : 65007-65016

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