Thin silicon layer SOI power device with linearly-distance fixed charge islands

Author: Yuan Zuo   Haiou Li   Jianghui Zhai   Ning Tang   Shuxiang Song   Qi Li  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.36, Iss.5, 2015-05, pp. : 54005-54009

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Abstract