MIM capacitors with various Al2O3 thicknesses for GaAs RFIC application

Author: Jiahui Zhou   Hudong Chang   Honggang Liu   Guiming Liu   Wenjun Xu   Qi Li   Simin Li   Zhiyi He   Haiou Li  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.36, Iss.5, 2015-05, pp. : 54004-54007

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