The effect of oxygen plasma ashing on the resistance of TiN bottom electrode for phase change memory

Author: Dan Gao   Bo Liu   Ying Li   Zhitang Song   Wanchun Ren   Juntao Li   Zhen Xu   Shilong Lü   Nanfei Zhu   Jiadong Ren   Yipeng Zhan   Hanming Wu   Songlin Feng  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.36, Iss.5, 2015-05, pp. : 56001-56006

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content