10–25 GHz frequency reconfigurable MEMS 5-bit phase shifter using push–pull actuator based toggle mechanism

E-ISSN： 1361-6439|25|6|65011-65029

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.6, 2015-06, pp. : 65011-65029

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