Author： Kumar Lalit Reimann Klaus Goossens Martijn J Besling Willem F A Dolleman Robin J Pijnenburg Remco H W Sarro Lina P M Steeneken Peter G Kumar Lalit
Publisher： IOP Publishing
E-ISSN： 1361-6439|25|4|45011-45020
ISSN： 0960-1317
Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.4, 2015-04, pp. : 45011-45020
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Access to resources
Recommend
Access to resources