Long‐throw magnetron sputtering of amorphous Zn–Sn–O thin films at room temperature

E-ISSN： 1862-6319|212|7|1482-1486

ISSN： 1862-6300

Source： PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Vol.212, Iss.7, 2015-07, pp. : 1482-1486

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