Low-power inductive RF plasma sources for technological applications

Author: Vavilin K.   Rukhadze A.   Ri M.   Plaksin V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-780X

Source: Plasma Physics Reports, Vol.30, Iss.8, 2004-08, pp. : 687-697

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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