Statistical study of the influence of LER and MGG in SOI MOSFET

Author: Indalecio G   Aldegunde M   Seoane N   Kalna K   García-Loureiro A J  

Publisher: IOP Publishing

ISSN: 0268-1242

Source: Semiconductor Science and Technology, Vol.29, Iss.4, 2014-04, pp. : 45005-45011

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next